News Article
ISMT Leads Chrome Research
International SEMATECH (ISMT) plans to co-ordinate industry-wide studies into the extension of chrome as mask absorber, other materials that could replace it and the economic impacts of both pathways.
International SEMATECH (ISMT) plans to co-ordinate industry-wide studies into the extension of chrome as mask absorber, other materials that could replace it and the economic impacts of both pathways.
Tantalum-based films are considered to be the leading candidate for an alternative. Issues for such a replacement (or for an enhanced chrome) include film deposition, resist application, film conductance and thickness, dry and wet etchability, and repairability.
Various characterisation and cost-of-ownership studies will be carried out with ISMT member companies, the supplier community and universities. ISMTs Mask Advisory Steering Council (MASC) made the decision at a workshop on the subject.