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Mergers & Acquisitions

Mattson Technology has signed a definitive agreement to sell its Wet Products division to SCP Global Technologies, a wet processing equipment provider. The sale is subject to certain conditions with closure due Q1 2003. As part of the transaction, Mattson Technology will retain the rights to all future royalty and settlement payments under a legal agreement with Dainippon Screen Manufacturing.
Mattson Technology has signed a definitive agreement to sell its Wet
Products division to SCP Global Technologies, a wet processing equipment
provider. The sale is subject to certain conditions with closure due Q1
2003. As part of the transaction, Mattson Technology will retain the
rights to all future royalty and settlement payments under a legal
agreement with Dainippon Screen Manufacturing.
Mattson and SCP are also in discussions to form a strategic alliance to
develop integrated cleaning technologies. The companies believe that the
integration of wet cleaning technologies with dry (plasma) process
technologies provides an increased opportunity to maximise process
performance results for transistor formation, post etch or implant process
wafer cleaning and pre-thermal process cleaning. SCP and Mattson plan to
cross license relevant intellectual property.
David L Dutton, CEO of Mattson, comments: "This transaction reinforces our
strategic focus on extending our leadership in next-generation rapid
thermal processing (RTP) and strip solutions and strengthens SCPs
position in the wet clean market."
SCP CEO and president Mark Peterson says: "The combination of our
resources and Mattson Technologys established wet technology will create
a very strong number two provider in the wet cleaning equipment market."


Entegris will pay $38.75mn for all assets associated with Asysts wafer
and reticle carrier product lines and intellectual property. In addition,
Entegris and Asyst will work on technological enhancements to develop
next-generation wafer carriers that interface with Asysts and others
automation systems. Entegris intends to hire key Asyst employees involved
with these product lines.

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